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BITTMANN applied technologies
Matthias Bittmann, Dipl. Phys.
Hirtenweg 54a
27356 Rotenburg (Wümme)
Tel. +49 4261 961805
Mobile:
Web: www.bittmann.com
Email: sales@bittmann.com
Plasma Generation
Used and refurbished RF Plasma Generators for use in applications like Sputtering, Plasma-Etching etc.
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Dressler Cesar 136D
RF-Generator, 13.56MHz, 600W, air cooled
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Dressler Cesar 1312D
RF Power Generator, 1.2 kW, 13.56 MHz, air cooled
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Dressler Cesar 1325D
RF-Generator, 2.5kW, 13.25 MHz, water cooling
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Huettinger TIS 1.2
1.2 kW RF-power generator, 13.56 MHz, water/air-cooling
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Huettinger IS 2.5
2.5 kW RF-power generator, 13.56 MHz, air cooling
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Huettinger TIS 0.5
RF-power generator, 13.56 MHz, 500W, water/air cooling
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ENI ACG-3
RF-Power Supply, 13.56MHz, 300W
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ENI ACG-5
RF-power generator, 13.56 MHz, 500W, aircooled
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ENI ACG-10
RF-power generator, 1.0 kW, 13.56 MHz
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ENI OEM-12A
300W RF-power generator, water cooling
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Advanced Energy HiLight 136
RF-Generator, 13.56 MHz, 600W
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Advanced Energy RFX-600
600W RF-Generator, 13.56MHz, aircooled, 230V
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ENI Plasmaloc-2 HF
LF-Plasma generator for use in etching applications. Frequency tunable in the range of 100 - 450 KHz @1400W