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Vacuum Evaporation

• BAK-600 evaporator

  
  

  4-pocket E-Gun Cryopump Rotary vane/Roots pumpstack Beckhoff PLC

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• Edwards E306

  
  

  Barreltype evaporator, completely refurbished w/ PLC controls, thermal evaporation sources, electrical actuated gate valve

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• Leybold L560

  
  

  Leybold Vacuum Process Chamber

  Size: D550 x 580mm

  Turbopump TurboVac 1000

  Gate Valve

  PVD configuration

      -    EGun

      -    Thermal

      -    Sputter

  Rotary substrate table

  Beckhoff PLC

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